Coating apparatus
AssigneeBeijing Apollo Ding Rong Solar Technology Co., Ltd.
InventorShuanlin SHI
Life of this patent
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Abstract
The present disclosure provides a coating apparatus for coating on a substrate surface including a plurality of separation chambers and a plurality of target material coating chambers, wherein at least one separation chamber is arranged between the two adjacent target material coating chambers; a plurality of diaphragms, which divide the internal of the coating apparatus into the plurality of separation chambers and a plurality of target material coating chambers, wherein each of the diaphragms is provided with a slit, so that the substrate moves between the target material coating chamber and the separation chamber through the slit; and a blowing device, which is arranged in one separation chamber and blows gas through the slit to the target material coating chamber adjacent to the slit.
Claims18
A coating apparatus for coating a substrate surface, comprising:
- a plurality of separation chambers and a plurality of target material coating chambers, wherein at least one separation chamber is arranged between said two adjacent target material coating chambers;
- a plurality of diaphragms, which divide the internal of said coating apparatus into the plurality of separation chambers and the plurality of target material coating chambers, wherein each of said diaphragms is provided with a slit, so that said substrate moves between said target material coating chamber and said separation chamber through said slit;
- and
- a blowing device, which is arranged in one separation chamber and blows gas through said slit to said target material coating chamber adjacent to said slit.
Dependencies are inferred from the claim text.