# US 2019/0168178 A1 · Apparatus and Method for Mixing Fluids with Degradational Properties

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2019/0168178 A1
- Document ID: US20190168178A1
- Status: Published application
- Kind: A1
- Application number: 16/271,111
- Filed: 2019-02-08
- Published: 2019-06-06
- Earliest claimed: 2015-04-01
- Assignees: Veeco Precision Surface Processing LLC
- Applicants: Veeco Precision Surface Processing LLC
- Inventors: John Taddei; John Clark; Mark Yannuzzi; Laura Mauer; Paul Vit
- Web page: https://patentgrep.com/patent/US20190168178A1

## CPC

- B01F 35/2132: {Concentration, pH, pOH, p(ION) or oxygen-demand (B01F35/2133 takes precedence)}
- B01F 23/451: by injecting one liquid into another
- B01F 23/49: {Mixing systems, i.e. flow charts or diagrams}
- B01F 23/711: {Heating materials, e.g. melting}
- B01F 35/189: {Venting, degassing or ventilating of gases, fumes or toxic vapours during mixing}
- B01F 35/2115: {Temperature}
- B01F 35/2211: {Amount of delivered fluid during a period}
- B01F 35/833: {Flow control by valves, e.g. opening intermittently}
- B01F: MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING (mixing paints B44D3/06)

## Abstract

An apparatus and method for mixing fluids with degradational properties are disclosed herein. The present system has been devised to safely and accurately dilute, heat and deliver a degradable fluid while simultaneously removing extraneous vapor, adding capability to monitor the temperature and capability to monitor the concentration of the diluted fluid.

## Claims

### Claim 1

A method for mixing fluids with degradational properties comprising the steps of:
selectively introducing a first fluid from to a first inlet of a mixing device from a first fluid circuit in which the first fluid flows, wherein the first fluid circuit contains a flow controller for controlling a flow rate of the first fluid within the first fluid circuit;
controllably introducing a degradation fluid into a first port of the mixing device that is located downstream of the inlet thereby forming a first mixture in the mixing device;
venting vapors from the first mixture through a vent formed in the mixing device;
monitoring a temperature of the first mixture within the mixing device prior to the first mixture being discharged through an outlet; and
sampling a volume of the first mixture by discharging the volume of the first mixture through a sampling port to a detector that is configured to measure a concentration of the first mixture prior to discharge through the outlet.

### Claim 2 (depends on 1)

The method of claim 1, wherein the first fluid comprises heated deionized water and the degradation fluid comprises ambient temperature hydrogen dioxide.

### Claim 3 (depends on 1)

The method of claim 1, wherein the vent is formed in a second port extending outwardly from a main body of the mixing device and a thermocouple is disposed within a third port that extends outwardly from the main body.

### Claim 4 (depends on 1)

The method of claim 1, wherein the sampling port comprises an elongated tube extending outwardly from a main body of the mixing device.

### Claim 5 (depends on 1)

The method of claim 1, wherein the sampling port includes a flow controller to controllably release the volume of the first mixture to the detector device.

### Claim 6 (depends on 1)

The method of claim 1, wherein the mixing device is configured as a single pass chemistry system that allows the fluid mixture to be dispensed at a temperature of about 75° C. and at ⅙ of an original concentration.

### Claim 7 (depends on 1)

The method of claim 1, wherein the first fluid is maintained at a stable temperature and a mix ratio of the degradation fluid:first fluid is maintained at 1:6, thereby producing the resulting first mixture at a known, stable temperature.