US 2019/0166433 A1Published application

Mems microphone

AssigneeAac Acoustic Technologies (Shenzhen) Co., Ltd.

InventorJinyu Zhang

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Abstract

An MENS microphone is provided in the present disclosure. The MENS microphone includes a fixing pole plate, a vibrating pole plate, an elastic arm; the fixing pole plate comprises a first fixing electrode, an insulating layer, a second fixing electrode that are superimposed sequentially, a through hole penetrating through the first fixing pole plate, the insulating layer and the second fixing pole plate; the vibrating pole plate is embedded in the through hole, comprises a main body and a plurality of spaced protrusions provided on two opposite side walls of the main body; the fixing pole plate comprises a plurality of spaced grooves recessed from two opposite inner walls of the fixing pole plate respectively toward corresponding outer walls, the grooves penetrates through the first fixing electrode, the insulating layer, the second fixing electrode; the protrusions are inserted into the grooves and correspond to the grooves one to one.

Claims9

Dependent claims

An MEMS microphone, comprises:

a fixing pole plate which comprises:
a first fixing electrode;
an insulating layer which comprises:
a main body;
and
a plurality of spaced protrusions provided on two opposite side walls of the main body;
a second fixing electrode that are superimposed sequentially;
and
a through hole penetrating through the first fixing pole plate, the insulating layer and the second fixing pole plate;
a vibrating pole plate provided on the fixing pole plate, which comprises:
a main body;
and
a plurality of spaced protrusions provided on two opposite side walls of the main body;
and
an elastic arm connecting the fixing pole plate and the vibrating pole plate;
wherein the fixing pole plate further comprises a plurality of spaced grooves recessed from two opposite inner walls of the fixing pole plate respectively toward corresponding outer walls, and each of the grooves penetrates through the first fixing electrode, the insulating layer and the second fixing electrode;
the protrusions are inserted into the grooves and correspond to the grooves one to one.

14 more elements

Dependencies are inferred from the claim text.