Robot, analog-to-digital converter, and solid-state imaging device

A robot comprising:

• a base;
• and
• an arm that is supported to be movable with respect to the base and includes a solid-state imaging device,
• wherein the solid-state imaging device includes an analog-to-digital converter that performs analog-to-digital conversion on a pixel signal generated by reading pixel information from a light receiving element,
• the analog-to-digital converter includes:
• a comparison circuit that compares a voltage applied to a first terminal with a reference voltage applied to a second terminal, and outputs an output signal indicating a comparison result from a third terminal;
• capacitive elements each of which has a first end connected to the first terminal of the comparison circuit via a first line, and includes:
• a first to an m-th capacitive element (where m is an integer of 2 or more) that each have a predetermined capacitance ratio;
• and an (m+1)-th capacitive element that has a capacitance that is substantially same as the capacitance of the first capacitive element;
• and
• selection circuits that are connected to second ends of the capacitive elements, respectively, via second lines, and
• each of the capacitive elements includes:
• a first electrode disposed in a semiconductor substrate and electrically connected to the second end;
• a third electrode disposed above the semiconductor substrate to oppose the first electrode and electrically connected to the second end;
• a second electrode disposed between the first electrode and the third electrode, above the semiconductor substrate, to oppose the first electrode and the third electrode and electrically connected to the first end;
• a first insulation film disposed between the first electrode and the second electrode;
• and
• a second insulation film disposed between the third electrode and the second electrode.