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US 2019/0165760 A1Published application
Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsMasashi SHIMURA, Atsushi MATSUO, Shinya AOKI, Shiro MURAKAMI, Ryuta NISHIZAWA
Life of this patent
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Abstract
A vibrator device includes abase, a circuit element that is attached to the base, and a vibrator element that is arranged at an active surface of the circuit element and is attached to the circuit element, and the circuit element includes a terminal for frequency adjustment that is used for frequency adjustment of the vibrator element and is disposed in a region that does not overlap the vibrator element when viewed in a plan view of the active surface.
Claims12
A vibrator device comprising:
- a base;
- a circuit element that is attached to the base;
- and
- a vibrator element that is arranged at an active surface of the circuit element and is attached to the circuit element,
- wherein the circuit element includes a terminal for frequency adjustment that is used for frequency adjustment of the vibrator element and is disposed in a region that does not overlap the vibrator element when viewed in a plan view of the active surface.
2 more elements
A method of manufacturing a vibrator device, the method comprising:
- preparing a circuit element in which a terminal for frequency adjustment that is used for frequency adjustment of a vibrator element is disposed on an active surface, and disposing the vibrator element on the active surface so as not to overlap the terminal for frequency adjustment when viewed in a plan view of the active surface;
- and
- processing an excitation electrode included in the vibrator element to adjust frequency of the vibrator element.
Dependencies are inferred from the claim text.