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US 2019/0165759 A1Published application
Vibration device, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsRyuta NISHIZAWA, Shiro MURAKAMI, Shinya AOKI, Atsushi MATSUO, Masashi SHIMURA
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Abstract
A vibration device including a vibrator, a circuit component, a relay substrate disposed between the vibrator and the circuit component, a package that accommodates the vibrator, the circuit component, and the relay substrate, a first metal bump that joins the circuit component to the package, a second metal bump that joins the relay substrate to the circuit component, and a third metal bump that joins the vibrator to the relay substrate.
Claims10
A vibration device comprising:
- a vibrator;
- a circuit component;
- a relay substrate disposed between the vibrator and the circuit component;
- a package that accommodates the vibrator, the circuit component, and the relay substrate;
- a first metal bump that joins the circuit component to the package;
- a second metal bump that joins the relay substrate to the circuit component;
- and
- a third metal bump that joins the vibrator to the relay substrate.
5 more elements
Dependencies are inferred from the claim text.