Vibrator device, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsShiro MURAKAMI, Atsushi MATSUO, Shinya AOKI, Masashi SHIMURA, Ryuta NISHIZAWA
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Abstract
A vibrator device includes a base, a relay substrate that is supported by the base, and a vibrator element that is supported by the relay substrate. In addition, the vibrator element includes a vibration substrate formed of a piezoelectric single-crystalline body and an excitation electrode disposed on the vibration substrate. In addition, the relay substrate includes a substrate formed of the piezoelectric single-crystalline body. A crystal axis of the substrate and a crystal axis of the vibration substrate are shifted from each other.
Claims10
A vibrator device comprising:
- a base:
- a relay substrate that is supported by the base;
- and
- a vibrator element that is supported by the relay substrate,
- wherein the vibrator element includes a vibration substrate formed of a piezoelectric single-crystalline body and an excitation electrode disposed on the vibration substrate,
- the relay substrate includes a substrate formed of the piezoelectric single-crystalline body, and
- a crystal axis of the substrate and a crystal axis of the vibration substrate are shifted from each other.
Dependencies are inferred from the claim text.