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US 2019/0165695 A1Published application
Semiconductor device
AssigneesDenso Corporation, University of Freiburg
InventorsKenta GODA, Oliver PAUL
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Abstract
The present disclosure provides a semiconductor device including a fixed electrode, a movable electrode and an elastic support. The movable electrode faces the fixed electrode and is movable relative to the fixed electrode. The elastic support supports the movable electrode to be movable in an elastic direction of the elastic support. Either one of the fixed electrode or the movable electrode is an electret electrode.
Claims5
A semiconductor device comprising:
- a fixed electrode;
- a movable electrode facing a main surface of the fixed electrode and being movable relative to the fixed electrode along the main surface;
- and
- an elastic support supporting the movable electrode to be movable in an elastic direction of the elastic support, wherein
- either one of the fixed electrode or the movable electrode is an electret electrode,
- each of the fixed electrode and the movable electrode includes electrode parts periodically provided in the elastic direction,
- a formation period of the electrode parts included in each of the fixed electrode and the movable electrode is less than twice a movable distance of the movable electrode from a resting state where the movable electrode rests to a compressed state where the elastic support is maximally compressed,
- the movable electrode does not overlap the fixed electrode in a front view of the main surface of the fixed electrode when the movable electrode is in the resting state, and
- the movable electrode is configured to overlap the fixed electrode when the movable electrode vibrates.
6 more elements
Dependencies are inferred from the claim text.