Li1+xAlxTi2-x(PO4)3 SOLID-STATE THIN FILM ELECTROLYTE FOR 3D MICROBATTERY AND METHOD OF FABRICATION
AssigneeInternational Business Machines Corporation
InventorsLele Peng, Qinghuang Lin, Yujun Xie
Life of this patent
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Abstract
A solid-state rechargeable 3D microbattery is provided that has improved power density, energy density, and cycle lifetimes. These improvements are afforded by providing a solid-state electrolyte that is composed of crystalline Li1+xAlxTi2−x(PO4)3, wherein x is from 0 to 2. The solid-state electrolyte that is composed of crystalline Li1+xA1xTi2−x(PO4) has a high ionic conductivity (which is greater than 10−4 Siemens/cm) as well as high chemical stability.
Claims20
A solid-state rechargeable 3D microbattery comprising:
- an anode current collector located on a semiconductor substrate;
- an anode region located on the anode current collector;
- a solid-state electrolyte composed of crystalline Li1+xAlxTi2−x(PO4)3, wherein x is from 0 to 2, and located on the anode region;
- a cathode located on the solid-state electrolyte;
- and
- a cathode current collector located on the cathode.
A solid-state electrolyte comprising a layer of crystalline Li1+xAlxTi2−x(PO4)3, wherein x is from 0 to 2.
A 3-dimensional chip stack comprising:
- a microprocessor, a memory, a sensor, a communicator unit and a solid-state rechargeable 3D microbattery, wherein the solid-state rehargeable 3D microbattery is connected with the 3D chip stack via a silicon interposer and through-silicon-vias (TSVs) and the microbattery comprises an anode current collector located on a semiconductor substrate, an anode region located on the anode current collector, a solid-state electrolyte composed of crystalline Li1+xAlxTi2−x(PO4)3, wherein x is from 0 to 2, and located on the anode region, a cathode located on the solid-state electrolyte, and a cathode current collector located on the cathode.
A method of forming a solid-state electrolyte, the method comprising:
- providing a first admixture of a basic environment, a lithium source solution, and an aluminum source solution;
- adding, in any order, to the first admixture a titanium source solution and a phosphorus source solution to provide a second admixture;
- removing solvent from the second admixture to provide a powder of Li1+xAlxTi2−x(PO4)3, wherein x is from 0 to 2;
- forming pellets of Li1+xAlxTi2−x(PO4)3 from the powder;
- and
- sputtering a layer of crystalline Li1+xAlxTi2−x(PO4)3 using the pellets as a solid-electrolyte source.
Dependencies are inferred from the claim text.