Back to results
US 2019/0165330 A1Published application
Evaporation equipment
AssigneesBoe Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.
InventorsKaihong Ma, Li Sun
Life of this patent
Estimating the term…
Abstract
In one embodiment, there is provided an evaporation equipment. The evaporation equipment includes: a plurality of evaporation sources for performing an evaporation on a substrate to be evaporated; and a partition for adjusting an evaporation range of each of the evaporation sources.
Claims16
An evaporation equipment, comprising:
- a plurality of evaporation sources for performing an evaporation on a substrate to be evaporated;
- and
- a partition for adjusting an evaporation range of each of the evaporation sources.
Dependencies are inferred from the claim text.