Formation of carbon nanotube-containing devices
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Bharat Kumar, George S. Tulevski
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Abstract
A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bifunctional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
Claims20
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands;
- a monolayer in the trench, wherein the monolayer is formed by a functionalized bifunctional compound having a first reactive moiety and a second reactive moiety, wherein the first reactive moiety is selectively chemically adsorbed onto exposed portions of the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the second reactive moiety of the functionalized bifunctional compound.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands, wherein each of the plurality of non-metal oxide islands has a width in a range of about 5 nm to about 500 nm;
- a monolayer in the trench, wherein the monolayer is formed by a functionalized bifunctional compound having a first reactive moiety and a second reactive moiety, wherein the first reactive moiety is selectively chemically adsorbed onto exposed portions of the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the second reactive moiety of the functionalized bifunctional compound.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate, wherein the metal oxide layer is selected from the group consisting of HfO2, ZrO2, HfSiO, HfSiON, TiO2, Y2O3, Al2O3, Ta2O5, InBaTiO3, BaSrTiO3 (BST), SrTiO3, and combinations thereof;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands;
- a monolayer in the trench, wherein the monolayer is formed by a functionalized bifunctional compound having a first reactive moiety and a second reactive moiety, wherein the first reactive moiety is selectively chemically adsorbed onto exposed portions of the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the second reactive moiety of the functionalized bifunctional compound.
Dependencies are inferred from the claim text.