Method for the manufacture of a correlated electron material device
AssigneeArm Limited
InventorsCarlos Alberto Paz de Araujo, Jolanta Bozena Celinska, Lucian Shifren
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Abstract
Disclosed is a method for the manufacture of a CEM device comprising forming a thin film of a correlated electron material having a predetermined electrical impedance when the CEM device in its relatively conductive (low impedance) state, wherein the forming of the CEM thin film comprises forming a d- or f-block metal or metal compound doped by a physical or chemical vapour deposition with a predetermined amount of a dopant comprising a back-donating ligand for the metal.
Claims21
-17. (canceled)
A method for the manufacture of a correlated electron material (CEM) device comprising forming a CEM thin film of a correlated electron material of predetermined leakage current density while the CEM device is in a relatively insulative (high impedance) state, wherein the forming of the CEM thin film comprises forming a d- or f-block metal or metal compound by a physical or chemical vapour deposition with a predetermined cross sectional area and a predetermined amount of a dopant comprising a back-donating ligand for the metal to impart the predetermined leakage current density, and wherein the predetermined cross-sectional area and predetermined electrical impedance are selected to provide a hole leakage current less than or equal to 500 A/cm2.
A correlated electron material (CEM) device comprising a CEM thin film of a correlated electron material having a predetermined leakage current density while the CEM device is in its relatively insulative state, wherein the CEM thin film comprises a d- or f-block metal or metal compound doped with a predetermined amount of a back-donating ligand for the metal to impart the predetermined electrical impedance, and wherein the CEM thin film has a predetermined cross-sectional area and a predetermined electrical impedance selected to provide a hole leakage current less than or equal to 500 A/cm2.
Dependencies are inferred from the claim text.