Hybrid structure for a suface acoustic wave device
AssigneeSoitec
InventorMarcel Broekaart
Life of this patent
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Abstract
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.
Claims20
A hybrid structure for a surface acoustic wave device comprising a useful piezoelectric layer having a first free face and a second face disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.
A method for manufacturing a hybrid structure for a surface acoustic wave device comprising:
- providing a useful piezoelectric layer having a first face and a second face;
- providing a support substrate that has a lower coefficient of thermal expansion than that of the useful layer;
- assembling the second face of the useful layer on the support substrate;
- and
- introducing gaseous species into the useful layer to form an area of nanocavities.
Dependencies are inferred from the claim text.