Metal rail conductors for non-planar semiconductor devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Liang CHEN, Charles Chew-Yuen Young, Hui-Ting Yang, Jiann-Tyng Tzeng, Kam-Tou Sio, Shih-Wei Peng, Wei-Cheng Lin, Lei-Chun Chou
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