Metal rail conductors for non-planar semiconductor devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Liang CHEN, Chih-Ming LAI, Ching-Wei TSAI, Charles Chew-Yuen YOUNG, Jiann-Tyng TZENG, Kuo-Cheng CHING, Ru-Gun LIU, Wei-Hao WU, Yi-Hsiung LIN, Chia-Hao CHANG, Lei-Chun CHOU
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