Conductive pattern, display device including the same, and method of manufacturing conductive pattern
AssigneeSamsung Display Co., Ltd.
InventorsJoon Geol LEE, Kyeong Su KO, Sang Won SHIN, Dong Min LEE, Sang Gab KIM, Sang Woo SOHN, Hyun Eok SHIN, Shin Il CHOI
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Abstract
A conductive pattern for a display device includes a first layer including aluminum or an aluminum alloy disposed on a substrate and forming a first taper angle with the substrate, and a second layer disposed on the first layer forming a second taper angle with the first layer, in which the second taper angle is smaller than the first taper angle.
Claims25
A conductive pattern for a display device, comprising:
- a first layer comprising aluminum or an aluminum alloy disposed on a substrate and forming a first taper angle with the substrate;
- and
- a second layer disposed on the first layer forming a second taper angle with the first layer,
- wherein the second taper angle is smaller than the first taper angle.
A display device, comprising:
- a substrate;
- a thin film transistor disposed on the substrate;
- and
- a conductive pattern connected to the thin film transistor and comprising:
- a first layer comprising aluminum or an aluminum alloy and forming a first taper angle with the substrate;
- and
- a second layer disposed on the first layer and forming a second taper angle smaller than the first taper angle.
A method of manufacturing a conductive pattern for a display device, the method comprising the steps of:
- forming a conductive layer comprising aluminum or an aluminum alloy;
- forming a capping layer on the conductive layer;
- forming a photoresist pattern on the capping layer;
- etching the capping layer and the conductive layer under a first condition;
- and
- etching the capping layer and the conductive layer under a second condition,
- wherein the first condition has a higher etching rate for the capping layer and the conductive layer than the second condition, and a lower consumption rate for the photoresist pattern than the second condition.
Dependencies are inferred from the claim text.