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US 2019/0164896 A1Published application
Semiconductor devices including cobalt alloys and fabrication methods thereof
AssigneeTohoku University
InventorsJunichi KOIKE, Reza ARGHAVANI
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Abstract
A semiconductor device includes a substrate, a conductive wiring which comprises cobalt or copper and is electrically connected to the substrate, an insulating material which electrically isolates the conductive wiring from neighboring wiring, and a first barrier layer which comprises a first cobalt alloy and is disposed between the conductive wiring and the insulating material.
Claims20
A semiconductor device, comprising:
- a substrate;
- a conductive wiring which comprises cobalt or copper and is electrically connected to the substrate;
- an insulating material which electrically isolates the conductive wiring from neighboring wiring;
- and
- a first barrier layer which comprises a first cobalt alloy and is disposed between the conductive wiring and the insulating material.
2 more elements
Dependencies are inferred from the claim text.