Semiconductor device and method of manufacture
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Chia Hu, Sen-Bor Jan, Hsien-Wei Chen, Ming-Fa Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Chia Hu, Sen-Bor Jan, Hsien-Wei Chen, Ming-Fa Chen
Estimating the term…
A semiconductor device including a test pad contact and a method of manufacturing the semiconductor device are disclosed. In an embodiment, a semiconductor device may include a first metal feature and a second metal feature disposed in a single top metal layer over a substrate. A test pad may be formed over and electrically connected to the first metal feature. A first passivation layer may be formed over the second metal feature and the test pad and may cover top and side surfaces of the test pad. A first via may be formed penetrating the first passivation layer and contacting the test pad and a second via may be formed penetrating the first passivation layer and contacting the second metal feature.
A method comprising:
A method comprising:
An integrated circuit comprising:
Dependencies are inferred from the claim text.