Substrate table with vacuum channels grid

A substrate table system, comprising:

• a substrate table configured to support a substrate, wherein the substrate table includes a plurality of vacuum channels provided therein and respectively formed with a vacuum opening on a surface of the substrate table, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed throughout the substrate table and arranged in a grid pattern;
• and
• a first pressure control module configured to independently control a vacuum pressure in each vacuum channel.

A substrate handling method, comprising:

• placing a substrate onto a surface of a substrate table, wherein a plurality of vacuum channels are formed in the substrate table and distributed throughout the substrate table;
• and
• applying a vacuum to the substrate through the vacuum channels and independently controlling a vacuum pressure in each vacuum channel to clamp the substrate on the substrate table.