Laser irradiation apparatus
AssigneeThe Japan Steel Works, Ltd.
InventorYuki SUZUKI
Life of this patent
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Abstract
In a laser irradiation apparatus 1 according to one embodiment, each of first and second flotation units 30a, 30b includes a base 31, and a porous plate 32 bonded to an upper surface of the base 31 by an adhesive layer 34, the base 31 includes a rising portion 312 protruding upward at an outer periphery facing at least the gap, and the porous plate 32 includes a cutout portion 321 configured to fit to the rising portion 312, and the adhesive layer 34 is formed along an inner wall of the rising portion 312 having fitted to the cutout portion 321.
Claims14
A laser irradiation apparatus comprising:
- first and second flotation units configured to each blow a gas upward and float a workpiece of a plate shape, and aligned at a predetermined interval;
- and
- a laser irradiation unit configured to irradiate the workpiece with a laser beam from an upper side in a gap between the first flotation unit and the second flotation unit, the workpiece being floated and conveyed from the first flotation unit to the second flotation unit, wherein
- each of the first and second flotation units includes
- a base, and
- a porous plate bonded to an upper surface of the base by an adhesive layer,
- the base includes a rising portion protruding upward at an outer periphery facing at least the gap, and the porous plate includes a cutout portion configured to fit to the rising portion, and
- the adhesive layer is formed along an inner wall of the rising portion having fitted to the cutout portion.
A laser irradiation apparatus comprising:
- (a) a laser oscillator configured to emit a laser beam to be irradiated on a workpiece of a plate shape;
- and
- (b) a flotation unit configured to float the workpiece by blowing and suctioning a gas, and including:
- (b1) a base including a pressurizing through-hole and a depressurizing through-hole formed therein;
- (b2) a porous plate located on an upper surface of the base and including a plurality of first through-holes formed therein;
- and
- (b3) an intermediate plate made of a metal located below the porous plate, accommodated inside the base and including a plurality of second through-holes formed therein, wherein
- the porous plate is disposed facing the workpiece,
- a pressurizing chamber configured to pressurize a gas is formed in a space between the porous plate and the intermediate plate,
- a depressurizing chamber configured to depressurize the gas is formed in a space between the base and the intermediate plate,
- the pressurizing through-hole is connected to the pressurizing chamber,
- the plurality of first through-holes are connected with the plurality of second through-holes,
- the depressurizing through-hole and the second through-hole are connected to the depressurizing chamber,
- the gas is blown through the pressurizing through-hole and a pore of the porous plate,
- the gas is suctioned through the depressurizing through-hole, and the pluralities of first and second through-holes, and
- diameters of the plurality of first through-holes are larger than diameters of the plurality of second through-holes.
Dependencies are inferred from the claim text.