Substrate transport system, substrate processing apparatus, hand position adjustment method
AssigneeEbara Corporation
InventorsKuniaki YAMAGUCHI, Haiyang XU, Koji MAEDA, Mitsuhiko INABA
Life of this patent
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Abstract
A substrate transport system includes a hand, a main positioning member permanently mounted on a base, where the main positioning member is engageable with the hand at a position offset by a first distance in the first axis direction and offset by a second distance in the second axis direction from a substrate transfer position, and a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.
Claims22
A substrate transport system comprising:
- a hand linearly movable along at least a first axis direction and a second axis direction orthogonal to each other;
- a main positioning member permanently mounted on a base, the main positioning member engageable with the hand at a position offset by a first design value in the first axis direction and offset by a second design value in the second axis direction from a substrate transfer position;
- and
- a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.
A substrate transport system comprising:
- a hand linearly movable along at least a first axis direction and a second axis direction orthogonal to each other;
- a first main positioning member permanently mounted on a base, the first main positioning member being capable of coming into contact with the hand at a position offset from a substrate transfer position by a first design value in the first axis direction;
- a second main positioning member permanently mounted on the base, the second main positioning member being capable of coming into contact with the hand at a position offset from the substrate transfer position by a second design value in the second axis direction;
- and
- a control unit that (a) stores a position coordinate of the hand in the first axis direction in a state where the hand is positioned by being brought into contact with the first main positioning member, and (b) stores a position coordinate of the hand in the second axis direction in a state where the hand is positioned by being brought into contact with the second main positioning member.
A method for adjusting a position of a hand linearly movable along at least a first axis direction and a second axis direction orthogonal to each other, the method comprising:
- positioning by engaging the hand with a main positioning member permanently mounted on a base at a position offset by a first design value in the first axis direction and offset by a second design value in the second axis direction from a substrate transfer position;
- and
- storing a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.
A method for adjusting a position of a hand linearly movable along at least a first axis direction and a second axis direction orthogonal to each other, the method comprising:
- positioning by bringing the hand into contact with a first main positioning member permanently mounted on a base at a position offset from a substrate transfer position by a first design value in the first axis direction;
- storing a position coordinate of the hand in the first axis direction in a state where the hand is brought into contact with the first main positioning member;
- positioning by bringing the hand into contact with a second main positioning member permanently mounted on the base at a position offset from the substrate transfer position by a second design value in the second axis direction;
- and
- storing a position coordinate of the hand in the second axis direction in a state where the hand is brought into contact with the second main positioning member.
Dependencies are inferred from the claim text.