Transport system
AssigneeMurata Machinery, Ltd.
InventorYoichi Motoori
Life of this patent
Estimating the term…
Abstract
A transport system includes an overhead transport vehicle that travels on a first track and is capable of delivering and receiving an article to and from a load port of a processing tool; a storage rack having a plurality of shelves that store the articles arranged in a vertical direction; a crane that travels on a second track parallel with the first track and is capable of delivering and receiving the article to and from the load port and the storage rack, respectively; and a first buffer arranged at a position where the crane that has stopped traveling at a position to deliver or receive the article to or from the load port is able to deliver or receive the article.
Claims19
-7. (canceled)
A transport system comprising:
- an overhead transport vehicle that travels on a first track and is capable of delivering and receiving an article to and from a load port of a processing tool;
- a storage rack having a plurality of shelves that store the articles arranged in a vertical direction;
- a crane that travels on a second track parallel with the first track and is capable of delivering and receiving the article to and from the load port and the storage rack, respectively;
- and
- a first buffer arranged at a position where the crane that has stopped traveling at a position to deliver or receive the article to or from the load port is able to deliver or receive the article.
Dependencies are inferred from the claim text.