Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system

A method of obtaining the amount of deviation of a central position of a measuring device mounted on an electrostatic chuck from a central position of the electrostatic chuck, wherein the measuring device includes:

• a disk-shaped base substrate;
• a plurality of sensor electrodes arranged in a circumferential direction about a central axis of the base substrate along a bottom surface of the base substrate;
• a high frequency oscillator configured to apply a high frequency signal to the plurality of sensor electrodes;
• and
• an operation unit configured to calculate a plurality of measurement values indicating electrostatic capacitances of the plurality of sensor electrodes from a plurality of detection values corresponding to potentials of the plurality of sensor electrodes,
• wherein the electrostatic chuck includes a ceramic main body having a periphery extending in a circumferential direction about a center of the electrostatic chuck and an electrode provided in the main body, and an edge of the electrode of the electrostatic chuck extends at an inner side of the periphery of the main body in the circumferential direction about the center of the electrostatic chuck,
• radially outer first edges of the plurality of sensor electrodes extend on a first circle having the same radius as a radius of the periphery of the main body of the electrostatic chuck and having the central axis of the base substrate as its center,
• radially inner second edges of the plurality of sensor electrodes extend on a second circle having the same radius as a radius of the edge of the electrode of the electrostatic chuck and having the central axis of the base substrate as its center, and
• the sensor electrodes are provided such that a sum B of shortest distances from the second edges of the plurality of sensor electrodes to the periphery of the electrostatic chuck becomes a constant value in a state where the measuring device is provided on the electrostatic chuck,
• wherein the sum B satisfies the following Eq. (2),
• ∑
• i
• =
• 1
• M
• 
• b
• ·
• D
• i
• =
• B
• Eq
• .
• 
• (
• 2
• )
• where M represents the number of the plurality of sensor electrodes, Di represents the plurality of measurement values and “b” represents a constant,
• the method comprising:
• calculating the plurality of measurement values Di by using the measuring device mounted on the electrostatic chuck;
• calculating the constant “b” in the Eq. (2) by using the plurality of calculated measurement values Di;
• calculating a plurality of distances indicating distances from the second edges of the plurality of sensor electrodes to the periphery of the electrostatic chuck by using the calculated constant “b” and the plurality of measurement values Di;
• and
• calculating the amount of deviation of the central position of the measuring device based on the plurality of calculated distances.

A method of calibrating transfer position data in a processing system by obtaining the amount of deviation of a central position of a measuring device from a reference position, the method comprising:

• selecting as the reference position a central position of a region surrounded by a focus ring or a central position of an electrostatic chuck,
• transferring the measuring device to a position in the region surrounded by the focus ring or a position on the electrostatic chuck which is specified by the transfer position data;
• calculating the amount of deviation of the central position of the measuring device from the selected reference position;
• and
• calibrating the transfer position data by using the calculated amount of deviation of the central position of the measuring device.