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US 2019/0164790 A1Published application
Systems and methods for wafer pod calibration
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChao-Hsiang LIU
Life of this patent
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Abstract
In an embodiment, a system includes: a wafer pod defining a cavity configured to store a wafer at a wafer position; calibration sensors within the cavity, each calibration sensor configured to produce calibration data indicating that the wafer is at a respective part of the cavity; and a processor configured to determine whether the wafer is positioned at the wafer position within the cavity based on the calibration data.
Claims20
A system, comprising:
- a wafer pod defining a cavity configured to store a wafer at a wafer position;
- calibration sensors within the cavity arranged in respective lines on both sides of an axis of entry that horizontally bisects the cavity, each calibration sensor configured to produce calibration data indicating that the wafer is at a respective part of the cavity;
- and
- a processor configured to determine whether the wafer is positioned at the wafer position within the cavity based on the calibration data.
1 more element
A system, comprising:
- a wafer pod configured to receive a wafer;
- calibration sensors within the wafer pod arranged in respective lines on both sides of an axis of entry that horizontally bisects the wafer pod, each calibration sensor configured to produce calibration data indicating the wafer within a respective part of the wafer pod;
- and
- a processor configured to produce error data indicating how the wafer is offset from a wafer position within the wafer pod based on the calibration data;
- and
- a robotic arm configured to move the wafer based on the error data.
3 more elements
A method, comprising:
- collecting calibration data characterizing a wafer within a part of a wafer pod defining a cavity, wherein the calibration data is produced from calibration sensors arranged in respective lines on both sides of an axis of entry that horizontally bisects the cavity;
- producing error data indicating how the wafer is offset from a wafer position within the cavity;
- and
- moving the wafer based on the error data.
1 more element
Dependencies are inferred from the claim text.