Ferrite Cage RF Isolator For Power Circuitry

Apparatus for providing isolated power to a component of a plasma processing chamber that also is subject to a plurality of RF signals, the plurality of RF signals including at least a first RF signal having a first RF frequency, the apparatus comprising:

• first and second coils;
• and
• a ferrite cage that surrounds said first and second coils, said ferrite cage comprising:
• a first dielectric disc supporting said first coil;
• a second dielectric disc supporting said second coil;
• first and second pluralities of ferrite pieces disposed on a side of said first dielectric disc facing away from said second dielectric disc;
• third and fourth pluralities of ferrite pieces disposed on a side of said second dielectric disc facing away from said first dielectric disc;
• the first through fourth pluralities of ferrite pieces being arranged such that the first and second dielectric discs and the first and second coils are inside the first through fourth pluralities of ferrite pieces;
• a fifth plurality of ferrite pieces to connect respective ones of the first and second pluralities of ferrite pieces to the third and fourth pluralities of ferrite pieces;
• said fifth plurality of ferrite pieces to separate said first and second dielectric discs so that the first and second coils are spaced apart by a predetermined distance;
• said first coil to receive an input voltage signal and said second coil to provide an isolated power signal.