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US 2019/0164727 A1Published application
Part for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
AssigneeTokyo Electron Limited
InventorsNaoki SUGAWA, Naoyuki SATOH, Kazuya NAGASEKI
Life of this patent
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Abstract
A part for a semiconductor manufacturing apparatus, the part being enabled to cause electricity to pass through and including an insulating member.
Claims14
A part for a semiconductor manufacturing apparatus, the part being enabled to cause electricity to pass through, the part comprising:
- an insulating member.
A semiconductor manufacturing apparatus including
- a mounting stage inside a treatment chamber;
- an electrostatic chuck installed on the mounting stage;
- and
- a focus ring installed on the electrostatic chuck and placed at a peripheral edge portion of an object to be processed,
- wherein an insulating member is provided at a portion of the focus ring that is electrically conductive.
2 more elements
Dependencies are inferred from the claim text.