Systems and methods for charged particle beam modulation
AssigneeASML Netherlands B.V.
InventorsEhud SHAKED, Martinus MAASSEN
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Abstract
Systems and methods for conducting charged particle beam modulation are disclosed. According to certain embodiments, a charged particle beam apparatus generates a plurality of charged particle beams. A modulator may be configured to receive the plurality of charged particle beams and generate a plurality of modulated charged particle beams. A detector may be configured to receive the plurality of modulated charged particle beams.
Claims28
A charged particle beam system comprising:
- a charged particle source configured to generate a plurality of charged particle beams;
- a modulator configured to receive the plurality of charged particle beams and generate a plurality of modulated charged particle beams;
- and
- a detector configured to receive the plurality of modulated charged particle beams.
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A method comprising:
- generating a plurality of modulated charged particle beams based on a plurality of charged particle beams generated by a charged particle source;
- and
- detecting the plurality of modulated charged particle beams.
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A non-transitory computer readable medium comprising a set of instructions that are executable by one or more processors of an apparatus to cause the apparatus to perform a method comprising:
- driving a modulator to generate a plurality of modulated charged particle beams using a plurality of modulation codes, the plurality of modulated charged particle beams based on a plurality of charged particle beams generated from a charged particle source.
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Dependencies are inferred from the claim text.