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US 2019/0164718 A1Published application
Ion implantation amount adjustment device and method, ion implantation apparatus and determination method
AssigneesBoe Technology Group Co., Ltd., Chengdu Boe Optoelectronics Technology Co., Ltd.
InventorsHao JING, Dongwoo KANG, Yongyi FU, Chenliang LIU, Rujian LI, Kang LUO
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Abstract
The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.
Claims11
An ion implantation amount adjustment device applied to an ion implantation apparatus, comprising:
- an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus;
- and
- an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.
Dependencies are inferred from the claim text.