Phosphor Screen for MEMS Image Intensifiers
AssigneeEagle Technology, LLC
InventorsArlynn W. SMITH, Dan CHILCOTT
Life of this patent
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Abstract
A phosphor screen for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier includes a wafer structure, a lattice of interior walls, a thin film phosphor layer, and a reflective metal layer. The wafer structure has a naturally opaque top layer and an active area defined within the naturally opaque top layer. The lattice of interior walls is formed, within the active area, from the naturally opaque top layer. The thin film phosphor layer is disposed in the active area, between the lattice of interior walls. The reflective metal layer that is disposed atop the thin film phosphor layer. In at least some instances, the thin film phosphor layer is a non-particle phosphor layer.
Claims23
A phosphor screen for a microelectromechanical image intensifier, comprising:
- a wafer structure with a naturally opaque top layer and an active area defined within the naturally opaque top layer;
- a lattice of interior walls formed from the naturally opaque top layer to define a plurality of pixels within the active area;
- a thin film phosphor layer that is disposed directly on a bottom of each pixel of the plurality of pixels, between the lattice of interior walls;
- and
- a reflective metal layer that is disposed atop the thin film phosphor layer.
(canceled)
A method of forming a phosphor screen for a microelectromechanical image intensifier, comprising:
- creating a pattern of pixels in an active area of a naturally opaque top layer of a wafer;
- growing a phosphor layer directly on a bottom of each pixel of the pattern of pixels;
- annealing the phosphor layer;
- and
- depositing a reflective metal over the phosphor layer.
(canceled)
A phosphor screen for a microelectromechanical image intensifier, comprising:
- a wafer structure with an active area;
- a lattice of depressions formed in a naturally opaque top layer of the wafer within the active area so that the naturally opaque layer defines a plurality of pixels, wherein each depression in the lattice of depressions includes a bottom and a plurality of side walls;
- a non-particle phosphor layer that is disposed directly on the bottom of each of the depressions;
- and
- a reflective metal layer that is disposed atop the phosphor layer.
(canceled)
Dependencies are inferred from the claim text.