Defect offset correction

A method for defect map correction, comprising:

• receiving a defect map from a defect scanner, wherein the defect map comprises a plurality of defect locations;
• annotating the defect map with a plurality of reference fiducial locations;
• determining multiple detected fiducial locations within image data of a semiconductor workpiece;
• determining a plurality of offset corrections based on comparing each of the multiple detected fiducial locations with respective reference fiducial locations;
• and
• producing a corrected defect map by applying the plurality of offset corrections to the defect map, wherein the applying the plurality of offset corrections translocates each of the plurality of defect locations.

A defect offset module, comprising:

• a network connection module configured to:
• access a defect map, wherein the defect map comprises at least one defect location;
• at least one processor configured to:
• annotate the defect map with a reference fiducial location;
• determine a detected fiducial location within image data of a semiconductor workpiece;
• determine an offset correction based on comparing the detected fiducial location with an associated reference fiducial location;
• and
• produce a corrected defect map by applying the offset correction to the defect map, wherein the applying the offset correction translocates the at least one defect location, wherein the network connection module is further configured to provide the corrected defect map to a defect reviewer configured to perform root cause analysis based on the corrected defect map.