Systems and methods for sensory automated material handing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Lin HSU, Richard LIN, Chiung-Min LIN, Alan YANG
Life of this patent
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Abstract
In an embodiment an automated material handling system (AMHS) for a semiconductor fabrication facility (FAB) includes: a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer; and a monitoring module configured to: detect a trigger event based on the sensor data, and initiate a remediation action in response to the trigger event.
Claims20
An automated material handling system (AMHS) for a semiconductor fabrication facility (FAB), comprising:
- a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer;
- and
- a monitoring module configured to:
- detect a trigger event based on the sensor data, and
- initiate a remediation action in response to the trigger event.
A system, comprising:
- a sensor supported by a stationary rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the stationary rail while suspended from the stationary rail via a trolley, wherein the vehicle is configured to carry at least one wafer while moving along the stationary rail via rolling movement;
- and
- a monitoring module configured to:
- determine a trigger event based on historical sensor data from the sensor,
- detect the trigger event based on the sensor data, and
- initiate a remediation action in response to the trigger event.
A method, comprising:
- collecting sensor data from a sensor supported by a rail, wherein the sensor data characterizes a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer while moving along the rail;
- detecting a trigger event based on the sensor data;
- and
- initiating a remediation action in response to the trigger event.
Dependencies are inferred from the claim text.