Salts and photoresists comprising same

A salt of the following Formula (I):

• wherein, R1, R2 and R3 are each independently C6-60 aryl group, a C6-20 fluoroaryl group, a C1-20 heteroaryl group, a C7-20 aralkyl group, a C7-20 fluoroaralkyl group, a C2-20 heteroaralkyl group, or a C2-20 fluoroheteroaralkyl group C1-20 alkyl group, a C1-20 fluoroalkyl group, a C3-20 cycloalkyl group, a C3-20 fluorocycloalkyl group, a C2-20 alkenyl group, a C2-20 fluoroalkenyl group, each of which is substituted or unsubstituted,
• wherein each R1 is either separate or connected to R2 and/or R3 to form a ring, and
• Z comprises a counter anion.