Method And System For A Low Parasitic Silicon High-Speed Phase Modulator
AssigneeLuxtera, Inc.
InventorsAli Ayazi, Gianlorenzo Masini, Subal Sahni, Attila Mekis, Thierry Pinguet
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AssigneeLuxtera, Inc.
InventorsAli Ayazi, Gianlorenzo Masini, Subal Sahni, Attila Mekis, Thierry Pinguet
Estimating the term…
Methods and systems for a low-parasitic silicon high-speed phase modulator are disclosed and may include in an optical phase modulator that comprises a PN junction waveguide formed in a silicon layer, wherein the silicon layer may be on an oxide layer and the oxide layer may be on a silicon substrate. The PN junction waveguide may have fingers of p-doped and n-doped regions on opposite sides along a length of the PN junction waveguide. Contacts may be formed on the fingers of p-doped and n-doped regions. The fingers of p-doped and n-doped regions may be arranged symmetrically about the PN junction waveguide or staggered along the length of the PN junction waveguide. Etch transition features may be removed along the p-doped and n-doped regions.
A method for a semiconductor device, the method comprising:
A system for communication, the system comprising:
A system for communication, the system comprising:
Dependencies are inferred from the claim text.