Mems device
AssigneeDenso Corporation
InventorsTetsuya ENOMOTO, Takashi KATSUMATA
Life of this patent
Estimating the term…
Abstract
A MEMS device includes a fixed portion fixed to a pedestal, a movable portion arranged inside the fixed portion and configured to be displaceable with respect to the fixed portion, a connecting portion that connects the fixed portion and the movable portion, a piezoelectric element disposed on at least one of the fixed portion or the connecting portion, and a detection portion that output a signal corresponding to a distortion of the movable portion. A voltage is applied to the piezoelectric element on the basis of the output signal of the detection portion thereby reducing the distortion transmitted from the fixed portion to the movable portion.
Claims12
A MEMS device comprising:
- a fixed portion fixed to a pedestal;
- a movable portion disposed inside the fixed portion and being configured to be displaceable with respect to the fixed portion;
- a connecting portion that connects the fixed portion and the movable portion;
- a piezoelectric element arranged on at least one of the fixed portion or the connecting portion;
- and
- a detection portion configured to output a signal corresponding to a distortion of the movable portion, wherein
- a voltage is applied to the piezoelectric element based on the output signal of the detection portion so as to reduce distortion transmitted from the fixed portion to the movable portion.
Dependencies are inferred from the claim text.