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US 2019/0162947 A1Published application
Multi-faceted mems mirror device useful for vehicle lidar
AssigneeAptiv Technologies AG
InventorYew Kwang Low
Life of this patent
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Abstract
An illustrative example MEMS device includes a base and a plurality of mirror surfaces supported on the base. The plurality of mirror surfaces are respectively in a fixed position relative to the base. The plurality of mirror surfaces are at respective angles relative to a reference. The respective angles of at least some of the mirror surfaces are different from the respective angles of at least some others of the mirror surfaces.
Claims20
A MEMS device, comprising:
- a base;
- and
- a plurality of mirror surfaces supported on the base, the plurality of mirror surfaces respectively being in a fixed position relative to the base, the plurality of mirror surfaces being at respective angles relative to a reference, wherein the respective angles of at least some of the mirror surfaces are different from the respective angles of at least some others of the mirror surfaces.
Dependencies are inferred from the claim text.