Thermal forcing system for controlling a temperature of a device under test
AssigneeIncavo Otax, Inc.
InventorsSheung Ming John Chiang, Glenn Chan
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AssigneeIncavo Otax, Inc.
InventorsSheung Ming John Chiang, Glenn Chan
Estimating the term…
A thermal forcing system for controlling a temperature of a device under test (DUT) includes a thermal plate, heater, temperature sensor, cold head, actuator, and controller. The thermal plate is thermally coupleable to the DUT. The temperature sensor senses a temperature of the thermal plate. The cold head has a temperature which is lower than that of the thermal plate. The controller is configured to: receive information of the temperature sensed by the temperature sensor; determine a temperature difference between a setpoint temperature and the temperature sensed by the temperature sensor; and command the actuator to move the cold head relative to the thermal plate or command the heater to heat the thermal plate, in response to the temperature difference, so as to facilitate adjusting the temperature of the thermal plate, and consequently the DUT, to the setpoint temperature.
A thermal forcing system for controlling a temperature of a device under test, the thermal forcing system comprising:
A method for controlling a temperature of a device under test, the method comprising:
A thermal control unit for controlling a temperature of a device under test, the thermal control unit comprising:
Dependencies are inferred from the claim text.