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AssigneeWit Co., Ltd.
InventorMasato UTSUMI
Estimating the term…
A multifunctional substrate inspection apparatus capable of selectively bringing probes into contact. The apparatus has first and second probe bases, to which probes 111-217 having different lengths and capable of contacting surfaces of a substrate, driving means increasing and decreasing an interval between the first and second probe base, an intermediate plate capable of carrying the substrate between the first and second probe bases, a first extendable pole or equivalent support mechanism attached to the first probe base and capable of pressing the substrate with a biasing force based on a driving force of the driving means transmitted via first biasing means, second biasing means for urging the substrate to be inspected away from the intermediate plate, and third biasing means for urging the intermediate plate away from the second probe base, the probes 111-217 being selectively brought into contact with the substrate according to their different lengths.
A multifunctional substrate inspection apparatus configured to select probes according to switching of inspection functions and bring the selected probes into contact with a substrate to be inspected comprising:
A multifunctional substrate inspection method in which electrical inspection is performed while bringing probes having different lengths and capable of being brought into contact with a first surface of a substrate to be inspected attached to a first probe base and probes having different lengths and capable of being brought into contact with a second surface of the substrate to be inspected attached to a second probe base into contact with the substrate to be inspected corresponding with an inspection step comprising:
Dependencies are inferred from the claim text.