Physical Quantity Sensor, Physical Quantity Sensor Device, Complex Sensor Device, Inertial Measurement Unit, And Vehicle
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Life of this patent
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Abstract
A physical quantity sensor includes a substrate, a support portion fixed to the substrate, a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein, and a fixed electrode fixed to the substrate. The fixed electrode includes first and second fixed electrode fingers positioned on one side of the support portion, third and fourth fixed electrode fingers positioned on the other side thereof. The movable electrode includes first to fourth movable electrode fingers which face the first to fourth fixed electrode fingers in the first direction, respectively.
Claims17
A physical quantity sensor comprising:
- a substrate;
- a support portion fixed to the substrate;
- a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein;
- and
- a fixed electrode fixed to the substrate,
- wherein the fixed electrode includes a first fixed electrode, a second fixed electrode, a third fixed electrode, and a fourth fixed electrode, the first fixed electrode being positioned on one side of a second direction orthogonal to the first direction with respect to the support portion and having a first fixed electrode finger provided therein, the second fixed electrode being provided to be separated from the first fixed electrode and having a second fixed electrode finger provided therein, the third fixed electrode being positioned on the other side of the second direction with respect to the support portion and having a third fixed electrode finger provided therein, and the fourth fixed electrode being provided to be separated from the third fixed electrode and having a fourth fixed electrode finger provided therein, and
- the movable electrode includes a first movable electrode, a second movable electrode, a third movable electrode, and a fourth movable electrode, the first movable electrode having a first movable electrode finger provided to face the first fixed electrode finger in the first direction, the second movable electrode having a second movable electrode finger provided to face the second fixed electrode finger in the first direction, the third movable electrode having a third movable electrode finger provided to face the third fixed electrode finger in the first direction, and the fourth movable electrode having a fourth movable electrode finger provided to face the fourth fixed electrode finger in the first direction.
Dependencies are inferred from the claim text.