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US 2019/0162749 A1Published application
Physical quantity sensor, electronic device, and vehicle
AssigneeSeiko Epson Corporation
InventorMakoto Furuhata
Life of this patent
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Abstract
A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam which are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction.
Claims17
A physical quantity sensor comprising:
- a movable body;
- and
- a spring that supports the movable body,
- wherein the spring includes an arm having an elongate shape in a first direction, a first beam, and a second beam, the first beam and the second beam being adjacent to the arm and disposed in the first direction, and
- an end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction.
2 more elements
Dependencies are inferred from the claim text.