Sensor Unit, Method Of Manufacturing Sensor Unit, Inertial Measurement Device, Electronic Apparatus, And Vehicle

A method of manufacturing a sensor unit that comprises a plurality of terminal members each of which includes a lead portion and an external terminal portion having an external connection end face side, a sensor device connected to the lead portions of the plurality of terminal members, and a resin member that covers the sensor device and a part of the plurality of terminal members, the lead portion including a thin wall portion having a thickness thinner than the external terminal portion and a protruding portion protruding from the thin wall portion to the external connection end face side, the method comprising:

• forming a thin plate portion including a thin wall portion by performing etching on a lead frame base material provided with a first mask for forming the thin wall portion from an external connection end face side;
• forming a lead frame including the terminal member provided with the external terminal portion and the protruding portion by providing a second mask for forming the terminal member on the lead frame base material and performing etching after the forming of the thin plate portion;
• placing the sensor device on the lead frame at a side opposite to a protruding side of the protruding portion by an electrical connection;
• arranging the resin member so as to cover the sensor device placed on the lead frame and a part of the plurality of terminal members;
• and
• cutting the lead frame and the resin member covered by the resin member.