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US 2019/0162694 A1Published application
Gas sensor
AssigneeKabushiki Kaisha Toshiba
InventorYumi HAYASHI
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Abstract
According to one embodiment, a gas sensor includes a fixed electrode, and a film structure which covers the fixed electrode, forms a cavity inside the film structure, and includes a sensitive layer formed of an amorphous material containing a metal element, and a cap layer provided on the sensitive layer. The film structure is allowed to be deformed when the sensitive layer absorbs a predetermined gas.
Claims20
A gas sensor comprising:
- a fixed electrode;
- and
- a film structure which covers the fixed electrode, forms a cavity inside the film structure, and includes:
- a sensitive layer formed of an amorphous material containing a metal element;
- and
- a cap layer provided on the sensitive layer,
- the film structure allowed to be deformed when the sensitive layer absorbs a predetermined gas.
4 more elements
A gas sensor comprising a film structure, the film structure including:
- a sensitive layer formed of an amorphous material containing a metal element;
- and
- a cap layer provided on the sensitive layer and containing at least one element selected from silicon (Si), phosphorous (P) and boron (B).
A gas sensor comprising a film structure, the film structure including:
- a base layer;
- an intermediate layer provided on the base layer and containing at least one of titanium (Ti) and tantalum (Ta);
- and
- a sensitive layer provided on the intermediate layer and formed of an amorphous material containing a metal element.
1 more element
Dependencies are inferred from the claim text.