Thermal diffusion factor measurement device, thermal diffusion factor measurement method and program

A method for measuring the thermal diffusion factor of an object to be measured, having a front face and a rear face, by heating the front face of the object and thereby detecting a temperature of the rear face of the object, the method comprising:

• a heating step of periodically heating a heating location on the front face of the object in a non-contact manner;
• a temperature detecting step of detecting a temperature of a detection location on the rear face of the object in a non-contact manner;
• and
• a computing step of calculating a phase delay of a temperature cycle detected at the temperature detecting step relative to a heating cycle at the heating step, and then computing the thermal diffusion factor of the object based on the calculated phase delay,
• wherein, in the computing step, an intensity of a detection sensitivity distribution at the detection location is obtained with respect to the temperature detected at the temperature detection step, and a phase of the detected temperature cycle at the detection location and the obtained intensity of the detection sensitivity distribution are subjected to integral processing to thereby calculate the phase delay at the detection location, so that the thermal diffusion factor of the object can be computed.

A program for measuring the thermal diffusion factor of an object to be measured, having a front face and a rear face, the program being executed by a computer, wherein the thermal diffusion factor of the object is measured using a thermal diffusion factor measurement device by heating the front face of the object and detecting a temperature of the rear face of the object,

• wherein:
• the front face of the object is periodically heated by the thermal diffusion factor measurement device in a non-contact manner;
• the temperature of a detection location is detected on the rear face of the object in a non-contact manner;
• an intensity of a detection sensitivity distribution is obtained with respect to the detected temperature at the detection location;
• and a phase of the detected temperature cycle at the detection location and the intensity of the detection sensitivity distribution are subjected to integral processing to thereby calculate a phase delay at the detection location between the heating cycle and the detected temperature cycle, so that the thermal diffusion factor of the object can be computed.