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US 2019/0162619 A1Published application
Physical Quantity Sensor, Physical Quantity Sensor Device, Complex Sensor Device, Electronic Device, And Vehicle
AssigneeSeiko Epson Corporation
InventorMakoto FURUHATA
Life of this patent
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Abstract
A physical quantity sensor includes a substrate, a sensor element supported on the substrate, and a lid bonded to the substrate so as to store the sensor element between the substrate and the lid. The lid includes a protrusion on the substrate side. The protrusion is disposed not to overlap the sensor element in plan view of the substrate. The protrusion is separated from the substrate or is in contact with the substrate so as to be capable of being separated from the substrate.
Claims20
A physical quantity sensor comprising:
- a substrate;
- a sensor element supported on the substrate;
- and
- a lid bonded to the substrate so as to store the sensor element between the substrate and the lid,
- wherein the lid includes a protrusion on the substrate side,
- the protrusion is disposed not to overlap the sensor element in plan view of the substrate, and
- the protrusion is separated from the substrate or is in contact with the substrate so as to be separable from the substrate.
4 more elements
A physical quantity sensor comprising:
- a substrate;
- a sensor element including a fixation portion fixed to the substrate;
- and
- a lid bonded to the substrate so as to store the sensor element between the lid and the substrate,
- wherein the lid includes a protrusion on the substrate side,
- the protrusion is disposed to overlap the fixation portion in plan view, and
- the protrusion is separated from the fixation portion or is in contact with the fixation portion so as to be separable from the fixation portion.
4 more elements
A physical quantity sensor comprising:
- a substrate;
- a sensor element supported on the substrate;
- a structural member which is supported on the substrate and is disposed not to overlap the sensor element in plan view;
- and
- a lid bonded to the substrate so as to store the sensor element and the structural member between the lid and the substrate,
- wherein the lid includes a protrusion on the substrate side,
- the protrusion overlaps the structural member in plan view, and
- the protrusion is separated from the structural member or is in contact with the structural member so as to be separable from the structural member.
5 more elements
Dependencies are inferred from the claim text.