Pressure sensor and pressure sensor module
AssigneeAlps Alpine Co., Ltd.
InventorsHisanobu OKAWA, Chiaki KERA, Hideki GOCHO, Kazushige SEJIMO
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Abstract
A pressure sensor according to the present invention includes a first detection unit that is disposed in a first region and that detects an absolute value of a pressure of a first medium, a second detection unit that is disposed in a second region separated from the first region and that detects an absolute value of a pressure of a second medium that differs from the first medium, and a calculation unit that performs a calculation to obtain a difference between a first pressure detected by the first detection unit and a second pressure detected by the second detection unit.
Claims8
A pressure sensor comprising:
- a first detection unit that is disposed in a first region and that detects an absolute value of a pressure of a first medium;
- a second detection unit that is disposed in a second region separate from the first region and that detects an absolute value of a pressure of a second medium that differs from the first medium;
- and
- a calculation unit that performs a calculation to obtain a difference between a first pressure detected by the first detection unit and a second pressure detected by the second detection unit.
A pressure sensor module comprising:
- a substrate;
- a package that covers at least a portion of the substrate, that forms a first region and a second region on a first surface side, the first surface side being a surface of the substrate, and that includes a partition that separates the first region from the second region;
- a first detection unit that is disposed in the first region and that detects an absolute value of a pressure of a first medium;
- a second detection unit that is disposed in the second region and that detects an absolute value of a pressure of a second medium that differs from the first medium;
- and
- a calculation unit that is disposed on the first surface side and that performs a calculation to obtain via a wiring pattern a difference between a first pressure detected by the first detection unit and a second pressure detected by the second detection unit,
- wherein the package has a through hole that connects the second region to a space outside the package and an introduction hole that is disposed on the first surface side of the substrate and that enables a pressure of the first medium to be introduced to the first region.
Dependencies are inferred from the claim text.