Displacement detection type force-detection structure and displacement detection type force sensor

A force-detection structure comprising:

• a first end portion;
• a second end portion;
• a connecting portion that elastically connects the first end portion to the second end portion;
• a detecting part that detects a relative displacement between the first end portion and the second end portion, accompanied by elastic deformation of the connecting portion, and outputs, based on the said relative displacement, a detection value used for acquiring a first force component in a direction of a first axis, a second force component in a direction of a second axis orthogonal to the first axis, and a moment component about a third axis orthogonal to both of the first axis and the second axis, of a force applied to the first end portion or the second end portion;
• wherein
• the detecting part comprises:
• a first differentially-detecting section that detects, in a differential manner, a relative movement between the first end portion and the second end portion along the first axis as first movement data by using signals mutually reverse in phase;
• a second differentially-detecting section that detects, in a differential manner, a relative movement between the first end portion and the second end portion along the second axis as second movement data by using signals mutually reverse in phase;
• and
• a third differentially-detecting section that detects, in a differential manner, a relative rotation between the first end portion and the second end portion about a central axis along the third axis as rotation data by using signals mutually reverse in phase, so that
• the detecting part outputs the detection value based on the first movement data, the second movement data and the rotation data.