Displacement detection type six-axis force sensor

A six-axis force sensor comprising:

• a first end portion;
• a second end portion;
• an intermediate portion between the first end portion and the second end portion;
• a first connecting portion that elastically connects the first end portion to the intermediate portion with first three-degrees of freedom;
• a second connecting portion that elastically connects the second end portion to the intermediate portion with second three-degrees of freedom;
• a first detecting part that detects a relative displacement between the first end portion and the intermediate portion, accompanied by elastic deformation of the first connecting portion, and outputs, based on the said relative displacement, a first detection value used for acquiring a first force component in a direction of a first axis, a second force component in a direction of a second axis orthogonal to the first axis, and a third moment component about a third axis orthogonal to both of the first axis and the second axis, of a force applied to the first end portion or the second end portion;
• and
• a second detecting part that detects a relative displacement between the second end portion and the intermediate portion, accompanied by elastic deformation of the second connecting portion, and outputs, based on the said relative displacement, a second detection value used for acquiring a first moment component about the first axis, a second moment component about the second axis, and a third force component in a direction of the third axis, of the said force;
• wherein the intermediate portion, the first connecting portion and the second connecting portion are disposed in such a manner that the said force is applied to both of the first connecting portion and the second connecting portion without propagating through the intermediate portion between the first connecting portion and the second connecting portion.