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US 2019/0162539 A1Published application
Physical Quantity Sensor, Physical Quantity Sensor Device, Composite Sensor Device, Inertial Measurement Unit, Vehicle Positioning Apparatus, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorRyuji KIHARA
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes a pivoting mass having a first plate on one side of a rotation axis, a second plate on the other side of the rotation axis, and a link connecting the first plate to the second plate. The link includes a first slit, a second slit on one side of the first slit toward the first plate, and a third slit on the other side of the first slit toward the second plate. The second and third slits are also deviated toward a peripheral edge of the link with respect to the first slit.
Claims20
A physical quantity sensor comprising:
- a substrate;
- a mount upstanding from the substrate;
- and
- an element section supported by the mount so as to be spaced apart from the substrate,
- wherein the element section includes:
- a fixed support attached to the mount;
- a movable plate;
- and
- a support beam that connects the fixed support to the movable plate,
- wherein the movable plate is pivotable about a rotation axis along the support beam,
- wherein the movable plate includes:
- a first mass plate that is located on a first side of the rotation axis and is spaced apart from the fixed support by a first gap;
- a second mass plate that is located on a second side of the rotation axis and is spaced apart from the fixed support by a second gap;
- and
- a link that is connected to the support beam, and connects the first mass plate to the second mass plate,
- wherein the link includes:
- a first opening having a center,
- a second opening that is located on a first mass plate side of the first opening, the second opening having a center, and
- a third opening that is located on a second mass plate side of the first opening, the third opening having a center, and
- wherein, a first central axis extends in a first direction orthogonal to the rotation axis and through the center of the first opening, a second central axis extends in the first direction through the center of the second opening, a third central axis extends in the first direction through the center of the third opening, and each of the second central axis and the third central axis is laterally offset from the first central axis toward an exterior peripheral edge of the link.
17 more elements
A physical quantity sensor comprising:
- a substrate;
- a first mount upstanding from the substrate;
- a second mount upstanding from the substrate proximate the first mount;
- a proof mass supported by the mount so as to be pivotably suspended relative to the substrate, the proof mass including:
- a first fixed support secured to the first mount;
- a second fixed support secured to the second mount;
- a first T-shaped beam having a cross bar extending in a first direction from the first fixed support to the second fixed support, and a stem extending in a gap between the first and second supports along a rotation axis orthogonal to the first direction;
- a second T-shaped beam having a cross bar extending in the first direction from the first fixed support to the second fixed support, and a stem extending in the gap between the first and second supports along the rotation axis orthogonal to the first direction;
- a first link extending in the first direction at a distal end of the stem of the first beam;
- a second link extending in the first direction at a distal end of the stem of the second beam;
- a first mass plate extending from first ends of the first and second links on a first lateral side of the rotation axis, the first mass plate being spaced apart from the first fixed support by a first gap;
- and
- a second mass plate extending from second ends of the first and second links on a second lateral side of the rotation axis, the second mass plate being spaced apart from the second fixed support by a second gap;
- wherein each of the first and second links includes:
- a first slit extending in the first direction and crossing the rotation axis, the first slit having rounded ends and a major axis extending in the first direction;
- a second slit extending in the first direction and being entirely located between the rotation axis and the first mass plate, the second slit having rounded ends and a major axis extending in the first direction;
- and
- a third slit extending in the first direction and being entirely located between the rotation axis and the second mass plate, the third slit having rounded ends and a major axis extending in the first direction,
- wherein the major axis of the second slit and the major axis of the third slit are laterally offset from the major axis of the first slit toward an exterior peripheral edge of the proof mass.
16 more elements
Dependencies are inferred from the claim text.