Three-dimensional surface roughness evaluating device, three-dimensional surface roughness evaluating method, three-dimensional surface roughness data acquiring device, and three-dimensional surface roughness data acquiring method

Abstract

A three-dimensional surface roughness evaluating device wherein a two-dimensional laser displacement meter is disposed so that the width direction of the two-dimensional laser displacement meter coincides with a Y-axis direction, to be able to measure displacement data of coordinates in the Y-axis direction at fixed intervals, the measuring width of the two-dimensional laser displacement meter is at least two or more times mean width of the roughness profile elements RSm of elements of a measurement target, and a calculating device is configured to generate reference surface data of each coordinate by averaging in the Y-axis direction the displacement data acquired at fixed intervals in the X-axis direction by the two-dimensional laser displacement meter, and generate three-dimensional surface roughness data of the measurement target by subtracting the reference surface data of each coordinate from the displacement data of each X-Y plane coordinate.

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