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AssigneeHORIBA STEC, Co., Ltd.
InventorsHiroshi NISHIZATO, Masakazu MINAMI, Yuhei SAKAGUCHI
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The present invention provides a gas control system which introduces carrier gas into a tank containing a material and leads out material gas generated by vaporization of the material from the tank together with the carrier gas, the gas control system being provided with: a flow rate control unit that is configure to control the flow rate of the material gas led out from the tank by adjusting the flow rate of the carrier gas introduced into the tank; and a control limit detection unit that is configured to detect a control limit state and output detection of the control limit state, the control limit state is a state that the adjustment of the flow rate of the carrier gas performed by the flow rate control unit cannot secure the flow rate control of the material gas at a predetermined performance level.
A gas control system that is configured to introduce carrier gas into a tank in which a material is contained, and lead out material gas generated by vaporization of the material together with the carrier gas from the tank, the gas control system comprising:
A detection method for detecting a control limit state of a flow rate of material gas in a gas control system where carrier gas is introduced into a tank containing a material and material gas generated by vaporization of the material is led out together with the carrier gas from the tank the detection method comprising:
A non-transitory computer-readable medium containing a program used for a gas control system where carrier gas is introduced into a tank containing a material and material gas generated by vaporization of the material is led out together with the carrier gas from the tank, the program making a computer exhibit functions of:
Dependencies are inferred from the claim text.