Method of coating a substrate and coating apparatus for coating a substrate
AssigneeApplied Materials, Inc.
InventorsHyun Chan PARK, Thomas GEBELE, Ajay Sampath BHOOLOKAM
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Abstract
According to one aspect of the present disclosure, a method of coating a substrate with at least one cathode assembly having a sputter target and a magnet assembly that is rotatable around a rotation axis is provided. The method comprises: Coating of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector; and subsequent coating of the substrate while moving the magnet assembly in a reciprocating manner in a second angular sector different from the first angular sector. According to a second aspect, a coating apparatus for performing said method is provided.
Claims20
A method of coating a substrate with at least one cathode assembly having a sputter target and a magnet assembly that is rotatable around a rotation axis, the method comprising:
- coating of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector;
- and
- subsequent coating of the substrate while moving the magnet assembly in a reciprocating manner in a second angular sector different from the first angular sector.
A method of coating a substrate with at least one cathode assembly having a rotatable sputter target and a magnet assembly positioned inside the rotatable sputter target, the magnet assembly being rotatable around a rotation axis (A), the method comprising:
- coating (I) of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector, wherein a first center angular position of the first angular sector is located on a first side of a plane perpendicularly extending from the substrate to the rotation axis (A);
- positioning the magnet assembly in a second angular sector, while keeping the rotatable sputter target at essentially zero voltage;
- and
- subsequent coating (II) of the substrate while moving the magnet assembly in a reciprocating manner in the second angular sector, wherein a second center angular position of the second angular sector is located on a second side of said plane.
A coating apparatus for coating a substrate comprising:
- at least one cathode assembly having a sputter target;
- a magnet assembly positioned inside the sputter target and rotatable around a rotation axis;
- and
- an actuator configured for moving the magnet assembly during coating in a reciprocating manner in two or more different angular sectors in succession, wherein at least one of center angular positions and extension angles of the angular sectors can be adjusted.
Dependencies are inferred from the claim text.